METHOD AND DEVICE FOR DEPOSITING THIN LAYERS, ESPECIALLY FOR THE PRODUCTION OF MULTIPLE LAYERS, NANOLAYERS, NANOSTRUCTURES AND NANOCOMPOSITES

• Main Authors: SERBEZOV VALERY, HERBST FRANZ
• Format: Patent
• Language: English
• Published: 10.01.2013
• Subjects: CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS, ORSURGICAL ARTICLES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; DISINFECTION, STERILISATION, OR DEODORISATION OF AIR; HUMAN NECESSITIES; HYGIENE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS, OR SURGICALARTICLES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEDICAL OR VETERINARY SCIENCE; METALLURGY; METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS INGENERAL; NANOTECHNOLOGY; PERFORMING OPERATIONS; PREPARATIONS FOR MEDICAL, DENTAL, OR TOILET PURPOSES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

The present disclosure relates to a method for the deposition of thin layers, particularly for producing multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface, which is characterized by the following features: a) the target is divided into segments with materials having most differing physical and/or chemical properties; b) individual segments of said target are irradiated with an in each case different radiation intensity by means of a controlled energetic distribution of the focused laser energy via the laser beam cross section so that each target segment absorbs the quantity of laser energy during the irradiation, which is required to evaporate or desorb the target material present in the respective segment.