METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER
In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
27.12.2012
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Subjects | |
Online Access | Get full text |
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Summary: | In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided. |
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Bibliography: | Application Number: US201213605927 |