Dislocation Engineering Using a Scanned Laser

A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser...

Full description

Saved in:
Bibliographic Details
Main Authors SCHWARZ KLAUS W, SCOTT J. CAMPBELL, LAI CHUNG WOH, MADAN ANITA, LIU XIAO HU
Format Patent
LanguageEnglish
Published 22.11.2012
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
Online AccessGet full text

Cover

Abstract A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser manipulates the plurality of dislocations on the surface portion of the semiconductor body by adjusting the temperature and the scan speed of the laser beam.
AbstractList A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser manipulates the plurality of dislocations on the surface portion of the semiconductor body by adjusting the temperature and the scan speed of the laser beam.
Author LIU XIAO HU
MADAN ANITA
SCOTT J. CAMPBELL
LAI CHUNG WOH
SCHWARZ KLAUS W
Author_xml – fullname: SCHWARZ KLAUS W
– fullname: SCOTT J. CAMPBELL
– fullname: LAI CHUNG WOH
– fullname: MADAN ANITA
– fullname: LIU XIAO HU
BookMark eNrjYmDJy89L5WTQdckszslPTizJzM9TcM1Lz8xLTS3KzEtXCC0GkYkKwcmJeXmpKQo-icWpRTwMrGmJOcWpvFCam0HZzTXE2UM3tSA_PrW4IDE5NS-1JD402MjA0MjI0sTYyMjR0Jg4VQA7zCxa
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
ExternalDocumentID US2012294322A1
GroupedDBID EVB
ID FETCH-epo_espacenet_US2012294322A13
IEDL.DBID EVB
IngestDate Fri Jul 19 13:58:18 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_US2012294322A13
Notes Application Number: US201213565018
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20121122&DB=EPODOC&CC=US&NR=2012294322A1
ParticipantIDs epo_espacenet_US2012294322A1
PublicationCentury 2000
PublicationDate 20121122
PublicationDateYYYYMMDD 2012-11-22
PublicationDate_xml – month: 11
  year: 2012
  text: 20121122
  day: 22
PublicationDecade 2010
PublicationYear 2012
RelatedCompanies INTERNATIONAL BUSINESS MACHINES CORPORATION
LIU XIAO HU
MADAN ANITA
SCOTT J. CAMPBELL
LAI CHUNG WOH
SCHWARZ KLAUS W
RelatedCompanies_xml – name: INTERNATIONAL BUSINESS MACHINES CORPORATION
– name: LAI CHUNG WOH
– name: SCOTT J. CAMPBELL
– name: SCHWARZ KLAUS W
– name: LIU XIAO HU
– name: MADAN ANITA
Score 2.8749588
Snippet A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
Title Dislocation Engineering Using a Scanned Laser
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20121122&DB=EPODOC&locale=&CC=US&NR=2012294322A1
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1bS8MwFD6MKbo3nYqXKQGlb8UupnV9KOKSliHugl1lb6MtCQykG2vFv-9J6LRPe8sFTi7k5Ms5yfkC8OAOMgRdj9rmaSNjubLTZ-mgqaIY86XyPKldA-OJN0rY28JdtOBrFwtjeEJ_DDkialSO-l6Z_Xrz78QS5m1l-ZitsGj9Es0DYdXWseYro9QSwyCcTcWUW5wHSWxNPkwd9Rku31e0lQ70QVoz7YefQx2XsmmCSnQChzOUV1Sn0JJFF4757u-1LhyN6ytvTNbaV56BLValxh7dPdIgEiTm3p-kJMZ5wm2TvCM0bc_hPgrnfGRju8u_YS6TuNnJpwtoF-tCXgLBU4nqS-nTXFKWuQpBXKm-YrnjqJSq_Ap6-yRd76--gY7O6vg6SnvQrrbf8haBtsruzPz8AqBtgEw
link.rule.ids 230,309,786,891,25594,76903
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFOebTsWPqQWlb8Uupp19KOLalaptN2wreytrSWAg3Vgr_vteQqd92lvIQb7I5ZffXe4CcG885Qi6JtHk00ZKC64tRkxHqsIptRg3TSZMA2Fk-il9mxvzDnxtY2FkntAfmRwRNapAfa_leb3-N2K58m1l9ZAvsWr17CW2qzbsWOQrI0R1x_ZkNnWnjuo4dhqr0YeUEYvi9n1BrrQ3QlIoydLnWMSlrNug4h3B_gzbK-tj6LCyDz1n-_daHw7CxuWNxUb7qhPQ3GUlsEcMT2klElSk319ZKDGuEx6bSoDQtDmFO2-SOL6G_WZ_08zSuD3IxzPolquSnYOCtxI-ZMwiBSM0NziCOOdDTgtd5wvCiwsY7Grpcrf4Fnp-EgZZ8Bq9X8GhEIlYO0IG0K033-waQbfOb-Ra_QLFb4M2
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Dislocation+Engineering+Using+a+Scanned+Laser&rft.inventor=SCHWARZ+KLAUS+W&rft.inventor=SCOTT+J.+CAMPBELL&rft.inventor=LAI+CHUNG+WOH&rft.inventor=MADAN+ANITA&rft.inventor=LIU+XIAO+HU&rft.date=2012-11-22&rft.externalDBID=A1&rft.externalDocID=US2012294322A1