Dislocation Engineering Using a Scanned Laser

A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser...

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Bibliographic Details
Main Authors SCHWARZ KLAUS W, SCOTT J. CAMPBELL, LAI CHUNG WOH, MADAN ANITA, LIU XIAO HU
Format Patent
LanguageEnglish
Published 22.11.2012
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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Summary:A system for manipulating dislocations on semiconductor devices, includes a moveable laser configured to generate a laser beam locally on a surface portion of the semiconductor body having a plurality of dislocations, the moveable laser being characterized as having a scan speed, the moveable laser manipulates the plurality of dislocations on the surface portion of the semiconductor body by adjusting the temperature and the scan speed of the laser beam.
Bibliography:Application Number: US201213565018