IMAGING OPTICS
An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an intern...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
16.08.2012
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Subjects | |
Online Access | Get full text |
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Summary: | An imaging optics includes a plurality of mirrors which reflect imaging light to image an object field in an object plane into an image field in an image plane. A mirror body of at least one of the mirrors has a through-opening for the imaging light to pass through. The through-opening has an internal region of a smallest opening width in the mirror body. The through-opening expands from the internal region towards both edge regions of the mirror body. A disturbing influence of unused light portions is reduced or eliminated completely. |
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Bibliography: | Application Number: US201213438591 |