MONOLITHIC TRI-AXIS AMR SENSOR AND MANUFACTURING METHOD THEREOF

A monolithic tri-axis anisotropic magnetoresistive (AMR) sensor and the method of manufacturing of the AMR sensor are presented. In one embodiment, the monolithic tri-axis AMR sensor includes (a) a substrate, (b) a first horizontal direction sensor disposed on the substrate, (c) a second horizontal...

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Bibliographic Details
Main Authors CAI YONGYAO, BYUN CHONGWON, JIANG LEYUE, ZHAO YANG
Format Patent
LanguageEnglish
Published 16.08.2012
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A monolithic tri-axis anisotropic magnetoresistive (AMR) sensor and the method of manufacturing of the AMR sensor are presented. In one embodiment, the monolithic tri-axis AMR sensor includes (a) a substrate, (b) a first horizontal direction sensor disposed on the substrate, (c) a second horizontal direction sensor disposed on the substrate, (d) a third horizontal direction sensor disposed on the substrate, and (e) a flux concentrator disposed on the third horizontal direction sensor, wherein the flux concentrator is in cooperation with the third horizontal direction sensor to realize a function of a Z-axis sensor, such that the Z-axis direction can be effectively measured. The integration of the tri-axis AMR sensor is therefore accomplished. In addition, the integrated tri-axis AMR sensor has low production cost and improved reliability.
Bibliography:Application Number: US201113194329