THROUGH SILICON VIAS USING CARBON NANOTUBES
The various embodiments of the present invention provide carbon nanotube (CNT)-based TSVs and methods of making the same. The CNT-based TSVs embodiments comprise a silicon wafer having a plurality of through-vias defined therein, and a support layer comprising a CNT catalyst layer disposed beneath t...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
09.08.2012
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Subjects | |
Online Access | Get full text |
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Summary: | The various embodiments of the present invention provide carbon nanotube (CNT)-based TSVs and methods of making the same. The CNT-based TSVs embodiments comprise a silicon wafer having a plurality of through-vias defined therein, and a support layer comprising a CNT catalyst layer disposed beneath the silicon wafer to facilitate CNT growth through the plurality of through-vias. Once CNT arrays have grown inside and through the through-vias, the support layer and accompanying CNT catalyst layer can be removed from the silicon wafer, which will result in the CNTs remaining in the TSVs. |
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Bibliography: | Application Number: US201213366545 |