COLORED CERAMIC VACUUM CHUCK AND MANUFACTURING METHOD THEREOF

• Main Authors: SUZUKI KIYOKA, MOTOYA HIDEKAZU, ISHIMI YOSHIHARU, SUZUKI SHIGEMI
• Format: Patent
• Language: English
• Published: 02.08.2012
• Subjects: ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL; APPARATUS SPECIALLY ADAPTED THEREFOR; ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; BORING; CEMENTS; CERAMICS; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GRINDING; HANDLING THIN OR FILAMENTARY MATERIAL; HOLOGRAPHY; LIME, MAGNESIA; MACHINE TOOLS; MATERIALS THEREFOR; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; ORIGINALS THEREFOR; PACKING; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PNEUMATIC TUBE CONVEYORS; POLISHING; REFRACTORIES; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; SLAG; STORING; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING; TREATMENT OF NATURAL STONE; TURNING

In the present invention, a ceramic vacuum chuck 2 having an upper surface for adsorbing a substrate is formed from a colored ceramic sintered body comprising 55-75% by weight alumina (Al2O3), at least 3% by weight Si in terms of oxide (SiO2), at least 0.4% by weight Ca in terms of oxide (CaO), at least 0.4% by weight Mg in terms of oxide (MgO), coloring agent, and 1% or less of impurities. A plurality of pins 4 for supporting the substrate, and a rim 6 are formed on the upper surface by shot blasting using abrasive grains, and the whole of the upper surface is shot peened using spherical particles.