Plasma Diagnostic Apparatus And Method For Controlling The Same

An example embodiment relates to a plasma diagnostic apparatus that exists outside of a plasma generation chamber. The plasma diagnostic apparatus is configured to recognize and/or diagnose a state of plasma using a signal flowing from a floated electrode of a plasma generation apparatus to determin...

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Bibliographic Details
Main Authors CHOI SEONG CHUL, SON GIL SU, KIM MYOUNG WOON, KIM SU HONG, CHO HYUNG CHUL
Format Patent
LanguageEnglish
Published 26.04.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An example embodiment relates to a plasma diagnostic apparatus that exists outside of a plasma generation chamber. The plasma diagnostic apparatus is configured to recognize and/or diagnose a state of plasma using a signal flowing from a floated electrode of a plasma generation apparatus to determine a diagnostic factor of the plasma.
Bibliography:Application Number: US201113271779