METHOD AND SYSTEM FOR THERMALLY CONDITIONING AN OPTICAL ELEMENT
A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providin...
Saved in:
Main Authors | , , , , , , , , , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
22.12.2011
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated. |
---|---|
Bibliography: | Application Number: US20090996945 |