OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS

A mount configured to mount an optical element in a module for a lithographic apparatus. The mount includes a plurality of resilient members constructed and arranged to circumferentially support the optical element. Each resilient member includes a plurality of resilient subsections that are configu...

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Bibliographic Details
Main Authors VANDERHALLEN IVO, TEGENBOSCH HENRICUS GERARDUS, BEERENS RUUD, ANTONIUS CATHARINA, MARIA, KLENIJN JACOB, STRUYCKEN ALEXANDER MATTHIJS
Format Patent
LanguageEnglish
Published 25.08.2011
Subjects
ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHOTOGRAPHY
PHYSICS
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Summary:A mount configured to mount an optical element in a module for a lithographic apparatus. The mount includes a plurality of resilient members constructed and arranged to circumferentially support the optical element. Each resilient member includes a plurality of resilient subsections that are configured to engage the optical element around a perimeter thereof Each resilient subsection is configured to flex independent of another resilient subsection.
Bibliography:Application Number: US200913054869