SPM NANOPROBES AND THE PREPARATION METHOD THEREOF

• Main Authors: PARK BUONG CHON, AN SANG JUNG, CHOI JIN HO, JEONG KWANG HOON, KAHNG YUNG-HO
• Format: Patent
• Language: English
• Published: 18.08.2011
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TESTING; TRANSPORTING

The present invention relates to SPM nanoprobes and the preparation method thereof, more particularly, to SPM nanoprobes comprising a spheroid deposit capped-nanoneedle bonded to one end of a mother tip, wherein the spheroid deposit is formed by particle beam induced deposition and is characterized in that the ratio of the diameter of the spheroid deposit to that of the nanoneedle is in the range of 1.5 to 8.5. The SPM nanoprobe according to the present invention is capable of imaging or measuring an irregularly curved or complicated surface, pattern and/or a frictional or adhesive force thereof and controlling size of a spheroid deposit formed at the end portion of nanoneedle and the ratio of the diameter of the spheroid deposit to that of the nanoneedle arbitrarily.