AUTO-SEQUENCING MULTI-DIRECTIONAL INLINE PROCESSING APPARATUS
An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
16.06.2011
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Subjects | |
Online Access | Get full text |
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Summary: | An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays. |
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Bibliography: | Application Number: US20100965798 |