ORGANOMETALLIC-COMPOUND FEEDER

An organometallic compound feeder comprising a packing container into which an organometallic compound that is in a solid state at an ordinary temperature is to be packed and a carrier gas is to be fed to sublimate the organometallic compound further comprises: a support plate which is to hold the o...

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Bibliographic Details
Main Author ABE TOSHIMITSU
Format Patent
LanguageEnglish
Published 26.05.2011
Subjects
CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGINGARTICLES OR MATERIALS
PACKING
PERFORMING OPERATIONS
STORING
TRANSPORTING
UNPACKING
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Summary:An organometallic compound feeder comprising a packing container into which an organometallic compound that is in a solid state at an ordinary temperature is to be packed and a carrier gas is to be fed to sublimate the organometallic compound further comprises: a support plate which is to hold the organometallic compound carried on an inert carrier in the packing container and which is to allow the carrier gas to pass therethrough, a carrier gas inlet in an upper portion of the packing container, a carrier gas outlet which is opened below the support plate in a bottom portion of the packing container, and a baffle plate which is attached between the support plate and the carrier gas outlet and is larger than an opening diameter of the carrier gas outlet, and the feeder is configured so as to allow carrier gas to pass downward through the organometallic compound carried on the inert carrier packed on the support plate.
Bibliography:Application Number: US20090935518