SCANNING OPTICAL MEASUREMENT APPARATUS HAVING SUPER RESOLUTION

• Main Authors: KIM DAE-GEUN, LEE EUNG-JANG, AHN HONG-GYU, PARK SEUNG-HAN
• Format: Patent
• Language: English
• Published: 25.11.2010
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Provided is a scanning optical measurement apparatus having super resolution. The scanning optical measurement apparatus includes: a light source; a first lens, which focuses light irradiated from the light source; a first pin hole, which is disposed next to the first lens; a second lens, which diverges light that passed through the first pin hole; a scanning unit, which scans light that passed through the second lens; a first beam splitter, which is disposed between the second lens and the scanning unit; an object lens, which focuses light that passed through the scanning unit on the subject; a slide, where the subject is placed; an optical probe, which reflects the light that passed through the subject after being irradiated from the light source; a second beam splitter, which is disposed between the scanning unit and the object lens; a first optical detector, which detects the light that passed through the first beam splitter after being reflected from the subject and the optical probe; a second pin hole, which is disposed between the first beam splitter and the first optical detector; and a second optical detector, which detects light that passed through the second beam splitter after being reflected from the subject and the optical probe.