Device for energy conversion, in particular a piezoelectric micropower converter
An apparatus, in particular a microsystem, includes a device for energy conversion. The device for energy conversion has a piezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy and/or vice versa, the diaphragm structure being arranged encap...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
14.10.2010
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Subjects | |
Online Access | Get full text |
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Summary: | An apparatus, in particular a microsystem, includes a device for energy conversion. The device for energy conversion has a piezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy and/or vice versa, the diaphragm structure being arranged encapsulated in an environment which has a predetermined pressure which is, in particular, lower than an isostatic pressure. |
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Bibliography: | Application Number: US20070310620 |