Device for energy conversion, in particular a piezoelectric micropower converter

An apparatus, in particular a microsystem, includes a device for energy conversion. The device for energy conversion has a piezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy and/or vice versa, the diaphragm structure being arranged encap...

Full description

Saved in:
Bibliographic Details
Main Authors ECKSTEIN GERALD, KUEHNE INGO
Format Patent
LanguageEnglish
Published 14.10.2010
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:An apparatus, in particular a microsystem, includes a device for energy conversion. The device for energy conversion has a piezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy and/or vice versa, the diaphragm structure being arranged encapsulated in an environment which has a predetermined pressure which is, in particular, lower than an isostatic pressure.
Bibliography:Application Number: US20070310620