ACTIVE SCANNER BOW COMPENSATOR

An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane moti...

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Bibliographic Details
Main Authors MOLONI KATERINA, KLEMP TIMOTHY K, FROST ADAM, CHASTEEN LUCAS, CODE DOUGLAS M, ARNDT RICHARD
Format Patent
LanguageEnglish
Published 13.05.2010
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS
CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane motion of the scanning platform relative to the frame of reference, and the actuators compensate for the out-of-plane motion by adjusting the orientation of the frame relative to the frame of reference. The active scanner bow compensator may be used in atomic force microscopy applications.
Bibliography:Application Number: US20090618316