ACTIVE SCANNER BOW COMPENSATOR
An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane moti...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
13.05.2010
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Subjects | |
Online Access | Get full text |
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Summary: | An active scanner bow compensator for use with a scanner is described. The scanner includes a moveable scanning platform supported within a frame. The active scanner bow compensator supports the scanner and includes a frame of reference, sensors, and an actuator. The sensors detect out-of-plane motion of the scanning platform relative to the frame of reference, and the actuators compensate for the out-of-plane motion by adjusting the orientation of the frame relative to the frame of reference. The active scanner bow compensator may be used in atomic force microscopy applications. |
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Bibliography: | Application Number: US20090618316 |