TRANSPORTING DEVICE FOR A VACUUM PROCESSING APPARATUS, DRIVE DEVICE FOR A COMPONENT OF A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS

A transport device for a vacuum processing system, a drive unit for high temperature processes in vacuum processing systems, and a vacuum processing system employ a drive unit which operates without the polygonal effect, can be connected endlessly, is suitable for high temperatures, is insensitive t...

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Bibliographic Details
Main Authors KENNE MARCO, HENTSCHEL MICHAEL, WILLKOMMEN UDO, VON DER WAYDBRINK HUBERTUS
Format Patent
LanguageEnglish
Published 01.04.2010
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:A transport device for a vacuum processing system, a drive unit for high temperature processes in vacuum processing systems, and a vacuum processing system employ a drive unit which operates without the polygonal effect, can be connected endlessly, is suitable for high temperatures, is insensitive to radiation heat, does not generate degassing and does not need a lubricant. The drive unit includes a traction element, guided around at least two deflecting rollers. The traction element is a continuous metal strip.
Bibliography:Application Number: US20090569276