METHOD FOR PRODUCING GLASS SUBSTRATE FOR MAGNETIC DISK
In the production of a glass substrate for magnetic disk, the present invention provides a method for producing a glass substrate for magnetic disk including a step of polishing a main surface of a circular glass substrate using a polishing pad made of a foamed resin while feeding a polishing liquid...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
05.11.2009
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Subjects | |
Online Access | Get full text |
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Summary: | In the production of a glass substrate for magnetic disk, the present invention provides a method for producing a glass substrate for magnetic disk including a step of polishing a main surface of a circular glass substrate using a polishing pad made of a foamed resin while feeding a polishing liquid containing an abrasive, in which a polishing pad made of a foamed resin having an international rubber hardness of 45 IRHD or less, the hardness being measured at a dry state before contact with a slurry by the M method defined in JIS K6253, is used as a starting polishing pad and polishing is started after a polishing surface of the starting polishing pad is subjected to a dressing treatment to adjust the pad so that an open pore area ratio is 8% or more and an average circle equivalent diameter of open pores is 10 mum or more, in order to suppress an increase in roll-off in the polishing step of the main surface of the circular glass plate. |
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Bibliography: | Application Number: US20090503960 |