Measuring instrument

A measuring instrument includes: an XY stage on which an object to be measured is placed; a probe holder having a plurality of probes; and a relative moving mechanism that relatively moves the XY stage and the probe holder. The probe holder is provided with a probe selection mechanism that has two g...

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Bibliographic Details
Main Authors ISHIZU KAZUHIRO, YAMAMOTO TAKESHI
Format Patent
LanguageEnglish
Published 17.09.2009
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:A measuring instrument includes: an XY stage on which an object to be measured is placed; a probe holder having a plurality of probes; and a relative moving mechanism that relatively moves the XY stage and the probe holder. The probe holder is provided with a probe selection mechanism that has two guide rails obliquely arranged and advances and retracts at least two of the probes to be selectively positioned at and away from a probe selection position.
Bibliography:Application Number: US20090379795