METHODS AND APPARATUS FOR SEALING A SLIT VALVE DOOR

Apparatus, methods and systems are provided for sealing a door of a slit valve. The invention includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along at least a portion...

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Bibliographic Details
Main Authors SICO ANGELA ROSE, STRASSNER JAMES D, RICE MICHAEL R
Format Patent
LanguageEnglish
Published 30.04.2009
Subjects
BLASTING
CYLINDERS
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
PISTONS
SEALINGS
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:Apparatus, methods and systems are provided for sealing a door of a slit valve. The invention includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along at least a portion of the length of the seal, wherein the hard stop and the seal fill at least a portion of a gap between the slit valve door and a substrate sealing surface. Numerous other aspects are provided.
Bibliography:Application Number: US20080256458