SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
A semiconductor device includes a semiconductor substrate; a source area, a channel area and a drain area vertically stacked on the semiconductor substrate; and a gate formed in both side walls of the stacked source area, channel area and drain area under interposition of a gate insulation layer.
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Main Author | |
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Format | Patent |
Language | English |
Published |
13.11.2008
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor device includes a semiconductor substrate; a source area, a channel area and a drain area vertically stacked on the semiconductor substrate; and a gate formed in both side walls of the stacked source area, channel area and drain area under interposition of a gate insulation layer. |
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Bibliography: | Application Number: US20070765670 |