METHOD OF INSPECTING AN IDENTIFICATION MARK, METHOD OF INSPECTING A WAFER USING THE SAME, AND APPARATUS FOR PERFORMING THE METHOD

• Main Authors: LEE KYU, PARK JE-KWON, KIM HYUN-HEE, KO JAE-KYUN, LIM YOUNG-KYU
• Format: Patent
• Language: English
• Published: 28.08.2008
• Subjects: CALCULATING; COMPUTING; COUNTING; HANDLING RECORD CARRIERS; PHYSICS; PRESENTATION OF DATA; RECOGNITION OF DATA; RECORD CARRIERS

In a method of inspecting an identification mark, an image of the identification mark on a semiconductor wafer is obtained. The identification mark may be identified using the identification mark image. A region where the identification mark is formed may be inspected using the identification mark i...