Three-dimensional measurement probe

• Main Authors: KUBO KEISHI, FUNABASHI TAKANORI, YOSHIZUMI KEIICHI, MOCHIZUKI HIROYUKI
• Format: Patent
• Language: English
• Published: 26.06.2008
• Subjects: GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TESTING

A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.