Three-dimensional measurement probe

A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial disp...

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Bibliographic Details
Main Authors KUBO KEISHI, FUNABASHI TAKANORI, YOSHIZUMI KEIICHI, MOCHIZUKI HIROYUKI
Format Patent
LanguageEnglish
Published 26.06.2008
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Summary:A three-dimensional measurement probe that is less likely to break, that is of long lifespan, and that is of low cost, capable of measuring the shape and the like of a measuring object such as an aspheric lens with higher precision is realized. A magnetic force for preventing rotation and axial displacement of a small slidably moving shaft part is generated by constructing a magnetic circuit by a magnet attached to a small air bearing part, a yoke, and a magnetic pin attached to the small slidably moving shaft part. The three-dimensional measurement probe is able to perform measurement from below and from the side since the magnetic force is non-contacting.
Bibliography:Application Number: US20070979034