SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING

A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

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Bibliographic Details
Main Authors KILEY CHRISTOPHER C, BUZAN FORREST T
Format Patent
LanguageEnglish
Published 19.06.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
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Summary:A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
Bibliography:Application Number: US20080032405