SEMICONDUCTOR MANUFACTURING PROCESS MODULES

A variety of process modules are described for use in semiconductor manufacturing processes.

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Bibliographic Details
Main Authors KILEY CHRISTOPHER C, VAN DER MEULEN PETER, PANNESE PATRICK D
Format Patent
LanguageEnglish
Published 29.05.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A variety of process modules are described for use in semiconductor manufacturing processes.
Bibliography:Application Number: US20070876910