Photodiode array and method for making thereof
Disclosed is a photodiode array comprising a semiconductor substrate; a plurality of photodiodes formed on the semiconductor substrate; and crystal fused regions losing crystallinity by fusing a semiconductor material of the photodiodes between the plurality of photodiodes.
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
24.04.2008
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Subjects | |
Online Access | Get full text |
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