Photodiode array and method for making thereof

Disclosed is a photodiode array comprising a semiconductor substrate; a plurality of photodiodes formed on the semiconductor substrate; and crystal fused regions losing crystallinity by fusing a semiconductor material of the photodiodes between the plurality of photodiodes.

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Bibliographic Details
Main Authors SAKAMOTO AKIRA, OKAMOTO KOUJI, FUJII YOSHIMARO
Format Patent
LanguageEnglish
Published 24.04.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Disclosed is a photodiode array comprising a semiconductor substrate; a plurality of photodiodes formed on the semiconductor substrate; and crystal fused regions losing crystallinity by fusing a semiconductor material of the photodiodes between the plurality of photodiodes.
Bibliography:Application Number: US20070987478