Method of classifying directional defects on an object and apparatus for performing the same

In a method of classifying directional defects on an object straight lines are drawn from any defect among all defects on the object toward adjacent defects. At least three defects that are positioned within an allowable angle from the straight lines are classified as directional defects. Thus, only...

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Bibliographic Details
Main Authors LEE BYUNG-AM, LEE KYU, PARK KYOUNG-HEE, PARK JE-KWON, KO JAE-KYUN, LIM YOUNG-KYU
Format Patent
LanguageEnglish
Published 14.02.2008
Subjects
CALCULATING
COMPUTING
COUNTING
HANDLING RECORD CARRIERS
PHYSICS
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
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Summary:In a method of classifying directional defects on an object straight lines are drawn from any defect among all defects on the object toward adjacent defects. At least three defects that are positioned within an allowable angle from the straight lines are classified as directional defects. Thus, only the directional defects among all the defects on the semiconductor substrate may be accurately classified after performing a chemical mechanical polishing (CMP) process, so that the CMP process may be effectively managed.
Bibliography:Application Number: US20070739900