METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER
In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalys...
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Main Authors | , , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
03.01.2008
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Subjects | |
Online Access | Get full text |
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Summary: | In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material; and (2) thermally-conductive fixtures positioned within the cartridge. Numerous other aspects are provided. |
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Bibliography: | Application Number: US20070673549 |