PRODUCT DESIGNED TO BE USED WITH HANDLING SYSTEM
A product (Pr) can be used in the semiconductor, MEM, flat screen and/or solar cell industries, where the product is capable of being gripped by a handling system (Bm). The product can include: a plate ( 1 ) made of silicon, quartz, silicon carbide, silicon nitride, arsenic, and/or gallium arsenide,...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
27.12.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A product (Pr) can be used in the semiconductor, MEM, flat screen and/or solar cell industries, where the product is capable of being gripped by a handling system (Bm). The product can include: a plate ( 1 ) made of silicon, quartz, silicon carbide, silicon nitride, arsenic, and/or gallium arsenide, comprising one first ( 2 ) and one second ( 3 ) opposite faces, a plateau ( 4 ) defined by at least one face ( 5 ) opposite the plate, an attachment means ( 7 ) of the plate ( 1 ) on the plateau ( 4 ) so that the at least one face ( 5 ) of the plateau ( 4 ) is opposite the first ( 2 ) or second ( 3 ) face of the plate, and a first gripping means ( 11 ) mounted in association with the plateau ( 4 ), where these said first gripping means is able to cooperate and is removable with second gripping means ( 12 ) in addition to the first gripping means ( 11 ), the second additional gripping means belonging to the handling system (Bm). Another embodiment of the invention is directed to a system for handling the product. |
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Bibliography: | Application Number: US20060426800 |