METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
06.12.2007
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Subjects | |
Online Access | Get full text |
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Summary: | According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects. |
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Bibliography: | Application Number: US20070838354 |