METHOD AND STRUCTURE FOR CREATION OF A METAL INSULATOR METAL CAPACITOR
The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protecti...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
15.11.2007
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Subjects | |
Online Access | Get full text |
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Summary: | The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer. |
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Bibliography: | Application Number: US20060382544 |