Implanted Counted Dopant Ions

This invention concerns semiconductor devices of the general type comprising a counted number of dopant atoms ( 142 ) implanted in regions of a substrate ( 158 ) that are substantially intrinsic semiconductor. One or more doped surface regions ( 152 ) of the substrate ( 158 ) are metallised to form...

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Main Authors DZURAK ANDREW S, HOPF TOBY F, PRAWER STEVEN, JAMIESON DAVID N, ANDRESEN SOREN, GAUJA ERIC, HEARNE SEAN, MITIC MLADEN, YANG CHANGYI
Format Patent
LanguageEnglish
Published 01.11.2007
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Summary:This invention concerns semiconductor devices of the general type comprising a counted number of dopant atoms ( 142 ) implanted in regions of a substrate ( 158 ) that are substantially intrinsic semiconductor. One or more doped surface regions ( 152 ) of the substrate ( 158 ) are metallised to form electrodes ( 150 ) and a counted number of dopant ions ( 142 ) are implanted in a region of the substantially intrinsic semiconductor.
Bibliography:Application Number: US20050596720