Implanted Counted Dopant Ions
This invention concerns semiconductor devices of the general type comprising a counted number of dopant atoms ( 142 ) implanted in regions of a substrate ( 158 ) that are substantially intrinsic semiconductor. One or more doped surface regions ( 152 ) of the substrate ( 158 ) are metallised to form...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
01.11.2007
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Subjects | |
Online Access | Get full text |
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Summary: | This invention concerns semiconductor devices of the general type comprising a counted number of dopant atoms ( 142 ) implanted in regions of a substrate ( 158 ) that are substantially intrinsic semiconductor. One or more doped surface regions ( 152 ) of the substrate ( 158 ) are metallised to form electrodes ( 150 ) and a counted number of dopant ions ( 142 ) are implanted in a region of the substantially intrinsic semiconductor. |
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Bibliography: | Application Number: US20050596720 |