Ultrasonic sensor and manufacture method of the same

• Main Authors: SUGIURA MAKIKO, WADO HIROYUKI
• Format: Patent
• Language: English
• Published: 01.11.2007
• Subjects: ELECTRICITY; MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; PHYSICS; TESTING

An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled po...