Ultrasonic sensor and manufacture method of the same

An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled po...

Full description

Saved in:
Bibliographic Details
Main Authors SUGIURA MAKIKO, WADO HIROYUKI
Format Patent
LanguageEnglish
Published 01.11.2007
Subjects
ELECTRICITY
MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled portion and the piezoelectric oscillator construct a membrane structure which will resonate at a predetermined frequency.
Bibliography:Application Number: US20070790298