Catadioptric projection objective

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second obje...

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Bibliographic Details
Main Authors DODOC AURELIAN, ULRICH WILHELM, EPPLE ALEXANDER, BUENAU RUDOLF V, SINGER WOLFGANG, MANN HANS-JUERGEN, SHAFER DAVID, BEDER SUSANNE
Format Patent
LanguageEnglish
Published 11.10.2007
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y', and an image side numerical aperture NA; wherein COMP1=Dmax/(Y'.NA2) and wherein the condition COMP1<10 holds.
Bibliography:Application Number: US20070653366