Semiconductor inspecting apparatus having device for cleaning tip of probe card and method for cleaning the tip
An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the...
Saved in:
Main Authors | , , , , |
---|---|
Format | Patent |
Language | English |
Published |
30.08.2007
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the chemical-wetting chamber may be integral parts of the apparatus. |
---|---|
Bibliography: | Application Number: US20070711786 |