Semiconductor inspecting apparatus having device for cleaning tip of probe card and method for cleaning the tip

An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the...

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Bibliographic Details
Main Authors MOON BYUNG-JUN, KIM DUK-KYEOM, LEE INOL, NAM JU-HYUN, CHOI JI-MAN
Format Patent
LanguageEnglish
Published 30.08.2007
Subjects
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the chemical-wetting chamber may be integral parts of the apparatus.
Bibliography:Application Number: US20070711786