INTEGRATED CIRCUIT SYSTEM WITH DUMMY REGION

An integrated circuit system comprised by forming a first region, a second region and a third region within a dielectric over a substrate. The first region includes tungsten plugs. The second region is formed adjacent at least a portion of the perimeter of the first region and the third region is fo...

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Bibliographic Details
Main Authors LIU DONG SHENG, MAHADEVAN SUBBIAH CHETTIAR, LIM CING GIE, CHEN FENG
Format Patent
LanguageEnglish
Published 26.07.2007
Subjects
ELECTRICITY
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Summary:An integrated circuit system comprised by forming a first region, a second region and a third region within a dielectric over a substrate. The first region includes tungsten plugs. The second region is formed adjacent at least a portion of the perimeter of the first region and the third region is formed between the first region and the second region. An opening is formed in the third region and a material is deposited within the opening for preventing erosion of the first region.
Bibliography:Application Number: US20060307142