Carbon nanotube and metal thermal interface material, process of making same, packages containing same, and systems containing same

A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using...

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Bibliographic Details
Main Authors CHRYSLER GREGORY M, MAVEETY JAMES G, PRACK EDWARD, VADAKKANMARUVEEDU UNNIKRISHNAN, DORY THOMAS S
Format Patent
LanguageEnglish
Published 05.07.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
Bibliography:Application Number: US20050323205