Polishing technique to minimize abrasive removal of material and composition therefor

The present invention provides a composition and a method of polishing a surface that minimizes abrasive removal of material from the surface. To that end, the composition is formulated to maximize dissolution of the material from the surface.

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Bibliographic Details
Main Authors GROSCHOPF JOHANNES, FARKAS JANOS, COOPER JENNIFER, COOPER KEVIN E, FLAKE JOHN C, SOLOMENTSEV YURI
Format Patent
LanguageEnglish
Published 05.10.2006
Subjects
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Summary:The present invention provides a composition and a method of polishing a surface that minimizes abrasive removal of material from the surface. To that end, the composition is formulated to maximize dissolution of the material from the surface.
Bibliography:Application Number: US20050093578