Polishing technique to minimize abrasive removal of material and composition therefor
The present invention provides a composition and a method of polishing a surface that minimizes abrasive removal of material from the surface. To that end, the composition is formulated to maximize dissolution of the material from the surface.
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
05.10.2006
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention provides a composition and a method of polishing a surface that minimizes abrasive removal of material from the surface. To that end, the composition is formulated to maximize dissolution of the material from the surface. |
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Bibliography: | Application Number: US20050093578 |