Method for filling water and device for filling water

Highly-pure water is stored into a storage tank 46 by reducing an impurity-ion content to not greater than a specified rate by removing impurity ions via a device 43 , for manufacturing pure water, containing ion-exchange resin, and by reducing a dissolved-oxygen content to not greater than a specif...

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Bibliographic Details
Main Authors SAKAKIBARA TETSUYA, KUMAKI NORIYASU
Format Patent
LanguageEnglish
Published 05.10.2006
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Summary:Highly-pure water is stored into a storage tank 46 by reducing an impurity-ion content to not greater than a specified rate by removing impurity ions via a device 43 , for manufacturing pure water, containing ion-exchange resin, and by reducing a dissolved-oxygen content to not greater than a specified rate by heating-deaerating with a heater 44 and reducing the pressure during storage in the storage tank 46 . Highly-pure water to be stored is injected from a gun 10 into a vessel body 1 while detecting a flow-rate via a mass-flow meter 53 . Therefore, a highly-accurate amount of water, with high purity, can be filled into the vessel body 1.
Bibliography:Application Number: US20060390666