Packages for alkanes having ultra-high transparency at 193 nm

Disclosed are packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelengths of about 193 nm. The packages holding the liquid alkanes can be stored for a period of months or longer with little or no loss of transparency and stability. Also disclosed are metho...

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Bibliographic Details
Main Authors WEIMING WEIMING Q, FRENCH ROGER H, PENG SHENG, WHELAND ROBERT C, FINCHER CURTIS R
Format Patent
LanguageEnglish
Published 07.09.2006
Subjects
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Summary:Disclosed are packages holding liquid alkanes exhibiting high transparency and photochemical stability at wavelengths of about 193 nm. The packages holding the liquid alkanes can be stored for a period of months or longer with little or no loss of transparency and stability. Also disclosed are methods for preparing the packages.
Bibliography:Application Number: US20050070918