SEMICONDUCTOR MANUFACTURING EQUIPMENT

A semiconductor manufacturing equipment comprising a canopy, a semiconductor processing device, a load port, a robot arm or a transferring device, an air vent, and a chemical filter to remove chemical substance in the air. A HEPA or ULPA filter may be included to filter off particulates. The load po...

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Bibliographic Details
Main Authors LIN CHIN-FU, TENG HSIEN, WU JEN-YUAN
Format Patent
LanguageEnglish
Published 18.05.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A semiconductor manufacturing equipment comprising a canopy, a semiconductor processing device, a load port, a robot arm or a transferring device, an air vent, and a chemical filter to remove chemical substance in the air. A HEPA or ULPA filter may be included to filter off particulates. The load port may have a standardized mechanical interface (SMIF) suitable for SMIF pods. In the case that the semiconductor processing device is a copper processing tool, an advantage of preventing copper from corrosion is attained in the present invention by removing chemical substance.
Bibliography:Application Number: US20040904541