ASYMMETRIC SPATIAL LIGHT MODULATOR IN A PACKAGE
Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.04.2006
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Subjects | |
Online Access | Get full text |
Cover
Summary: | Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface. |
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Bibliography: | Application Number: US20040969300 |