ASYMMETRIC SPATIAL LIGHT MODULATOR IN A PACKAGE

Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.

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Bibliographic Details
Main Authors GRASSER REGIS, HUIBERS ANDREW
Format Patent
LanguageEnglish
Published 20.04.2006
Subjects
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Summary:Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.
Bibliography:Application Number: US20040969300