Semiconductor memory devices including offset active regions

A semiconductor memory device may include a substrate having a plurality of active regions and a field isolation layer on the substrate surrounding the active regions of the substrate. Each of the plurality of active regions may have a length in a direction of a first axis and a width in a direction...

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Bibliographic Details
Main Authors MOON JOO-TAE, CHO HAN-KU, YEO GI-SUNG, BAEK KYOUNG-YUN, GOO DOO-HOON, WOO SANG-GYUN
Format Patent
LanguageEnglish
Published 13.04.2006
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Summary:A semiconductor memory device may include a substrate having a plurality of active regions and a field isolation layer on the substrate surrounding the active regions of the substrate. Each of the plurality of active regions may have a length in a direction of a first axis and a width in a direction of a second axis, and the length may be greater than the width. The plurality of active regions may be provided in a plurality of columns of active regions in the direction of the second axis, and active regions of adjacent columns may be offset in the direction of the second axis.
Bibliography:Application Number: US20050246594