Anisotropic conductivity connector, probe member, wafer inspecting device, and wafer inspecting method

• Main Authors: SATO KATSUMI, SETAKA RYOJI, NAOI MASAYA
• Format: Patent
• Language: English
• Published: 02.03.2006
• Subjects: BASIC ELECTRIC ELEMENTS; CURRENT COLLECTORS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LINE CONNECTORS; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Yx1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Yx6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 Omega is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 Omega is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 Omega is at most 1% of the total number of the conductive parts of connection.