PETER, R., JONATHAN, D., TERRY, T., & SATYADEV, P. (2005). Electrical contacts in microelectromechanical devices with multiple substrates (7.).
Chicago Style (17th ed.) CitationPETER, RICHARDS, DOAN JONATHAN, TARN TERRY, and PATEL SATYADEV. Electrical Contacts in Microelectromechanical Devices with Multiple Substrates. 7. 2005.
MLA (9th ed.) CitationPETER, RICHARDS, et al. Electrical Contacts in Microelectromechanical Devices with Multiple Substrates. 7. 2005.
Warning: These citations may not always be 100% accurate.