Variable seal pressure slit valve doors for semiconductor manufacturing equipment

Techniques for a door system for sealing an opening between two chambers in a semiconductor processing system are described. A sealing member seals the opening when a door is in a closed position. To selectively open and close the opening, an actuator moves the door. A valve actuator switch provides...

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Bibliographic Details
Main Authors BANG WON B, WANG YEN-KUN V, TRAN TOAN Q
Format Patent
LanguageEnglish
Published 08.12.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CHECKS FOR WINGS
DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FIXED CONSTRUCTIONS
KEYS
LOCKS
SAFES
SEMICONDUCTOR DEVICES
WINDOW OR DOOR FITTINGS
WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THEFUNCTIONING OF THE WING
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Summary:Techniques for a door system for sealing an opening between two chambers in a semiconductor processing system are described. A sealing member seals the opening when a door is in a closed position. To selectively open and close the opening, an actuator moves the door. A valve actuator switch provides a first or second pressure to the actuator depending on the pressure inside a first chamber. In one embodiment, a sensor monitors the pressure inside the first chamber.
Bibliography:Application Number: US20040990125